Ar⁺ irradiation effect on the change of microstructure and the silicide formation temperature of the ion beam mixed Pd-silicide

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Page Path: HOME > Kosin Med J > Volume 10(1); 1994 > Article

Original article Ar⁺ irradiation effect on the change of microstructure and the silicide formation temperature of the ion beam mixed Pd-silicide: Sookil Kim
Ar^(+) irradiation effect on the change of microstructure and the silicide formation temperature of the ion beam mixed Pd-silicide: Kosin Medical Journal 1994;10(1):7-17

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Keywords: Ar+ irradiation, He+ backscttering (RBS), X-ray diffractometer (XRD), Auger electron spectroscopy (AES), Pd-silicide formation temperature;

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